Thin-Film Sensor and Method of Fabricating Thin-Film Sensor
AssigneeKing Khalid University
InventorsAbdullah G. Al-Sehemi, Richard O. Ocaya, Fahrettin Yakuphanoglu, Ahmed A. Al-Ghamdi, Mohammed A. Assiri, Mehboobali Pannipara
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Abstract
The present disclosure provides a thin-film sensor including a top layer passivation including top electrical contacts; an active layer disposed under the top layer, the active layer including an active material; a bottom layer passivation disposed below the active layer and including bottom electrical contacts; and a semiconductor layer disposed around the active layer, such that the semiconducting layer sandwiches the active layer.
Claims12
A thin-film sensor comprising:
- a top layer passivation comprising top electrical contacts;
- an active layer disposed under the top layer, the active layer comprising an active material;
- a bottom layer passivation disposed below the active layer and comprising bottom electrical contacts;
- and
- a semiconductor layer disposed around the active layer, such that the semiconducting layer sandwiches the active layer.
A method of fabricating a thin-film sensor, the method comprising:
- providing a solution comprising a pre-cursor for an active material of the thin-film sensor;
- providing a substrate;
- depositing the solution comprising the pre-cursor for the active material onto the substrate, wherein the deposition occurs one or more times;
- annealing the deposited substrate in a pre-defined atmosphere, at a predetermined temperature for a predetermined duration of time to provide a thin-film on the substrate;
- and
- depositing top and bottom electrical contacts on the substrate comprising the thin-film.
Dependencies are inferred from the claim text.