Phase retrieval
AssigneeApplied Materials Israel Ltd.
InventorsBenny Kirshner, Boris Golberg
Life of this patent
Estimating the term…
Abstract
A method for phase retrieval, the method may include (a) obtaining multiple out-of-focus intensity images of one or more point spread function targets; wherein the out-of-focus intensity images are generated by based on residual collected light signals obtained by a residual collection channel of an optical unit having a numerical aperture that exceeds 0.8; and (b) calculating phase information, based on the multiple out-of-focus intensity images and on a vectorial model of the point spread function.
Claims19
A method for phase retrieval, the method comprises:
- obtaining multiple out-of-focus intensity images of one or more point spread function targets;
- wherein the multiple out-of-focus intensity images are generated based on residual collected light signals obtained by a residual collection channel of an optical unit having a numerical aperture that exceeds 0.8;
- and
- calculating phase information based on the multiple out-of-focus intensity images and on a vectorial model of the point spread function.
A computerized system for phase retrieval, the computerized system comprises a processing circuitry and a memory unit, wherein the processing circuitry is configured to:
- receive multiple out-of-focus intensity images of one or more point spread function targets;
- wherein the multiple out-of-focus intensity images are generated by based on residual collected light signals obtained by a residual collection channel of an optical unit having a numerical aperture that exceeds 0.8;
- and
- calculate phase information, based on the multiple out-of-focus intensity images and on a vectorial model of the point spread function.
A non-transitory computer readable medium for phase retrieval, the non-transitory computer readable medium stores instructions for:
- obtaining multiple out-of-focus intensity images of one or more point spread function targets;
- wherein the out-of-focus intensity images are generated by based on residual collected light signals obtained by a residual collection channel of an optical unit having a numerical aperture that exceeds 0.8;
- and
- calculating phase information, based on the multiple out-of-focus intensity images and on a vectorial model of the point spread function.
Dependencies are inferred from the claim text.