Precision vibration-isolation system with floor feedforward assistance
AssigneeTechnical Manufacturing Corporation
InventorsIgor KORDUNSKY, Jeffrey L. Worthey, Antonio Lopes
Life of this patent
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Abstract
Apparatus and methods to reduce unwanted motion in precision instruments are described. An active vibration-isolation system may include a feedback loop that senses motion of an intermediate mass. In noisy environments, where the feedback loop would otherwise fail or provide inadequate isolation, feedforward control can be implemented to sense floor vibrations and reduce motion of the intermediate mass that would otherwise be induced by the floor vibrations. The feedforward control can reduce motion of the intermediate mass to a level that allows the feedback loop to operate satisfactorily.
Claims7
A vibration-isolation control system comprising:
- a first signal path to receive and process a first signal from a feedback motion sensor, wherein the feedback motion sensor is configured to sense motion of an intermediate mass that is configured to isolate vibrations of a base from a payload or payload support;
- a first signal filter in the first signal path to filter the first signal;
- a first phase adjuster in the first signal path to change a phase of the first signal;
- a first amplifier in the first signal path to amplify the first signal;
- a second signal path to receive and process a second signal from a feedforward motion sensor, wherein the feedforward motion sensor is configured to sense motion of the base;
- a second signal filter in the second signal path to filter the second signal;
- a second phase adjuster in the second signal path to change a phase of the second signal;
- a second amplifier in the second signal path to amplify the second signal;
- and
- a summer to sum a first processed signal from the first signal path and a second processed signal from the second signal path to produce a drive signal for an actuator that is configured to drive the intermediate mass.
Dependencies are inferred from the claim text.