Oscillator with Fin Field-Effect Transistor (FinFET) Resonator
AssigneeApple Inc.
InventorsHarald Pretl, Ehrentraud Hager, Aly Ismail
Life of this patent
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Abstract
An integrated circuit may include oscillator circuitry having a resonator formed from fin field-effect transistor (FinFET) devices. The resonator may include drive cells of alternating polarities and sense cells interposed between the drive cells. The resonator may be connected in a feedback loop within the oscillator circuitry. The oscillator circuitry may include an amplifier having an input coupled to the sense cells and an output coupled to the drive cells. The oscillator circuitry may also include a separate inductor and capacitor based oscillator, where the resonator serves as a separate output filter stage for the inductor and capacitor based oscillator.
Claims20
An oscillator comprising:
- a resonator having:
- drive terminals;
- sense terminals coupled to the drive terminals;
- and
- fin field-effect transistor (FinFET) circuitry coupled to the drive and sense terminals, the FinFET circuitry having an array of fins characterized by a fin pitch determining a resonant frequency and configured to generate acoustic waves having a frequency that is in a subharmonic frequency range of the resonant frequency.
An oscillator comprising:
- fin field-effect transistor (FinFET) circuitry having one or more drive terminals and one or more sense terminals;
- and
- a transistor having a first source-drain terminal coupled to a drive terminal in the one or more drive terminals, a second source-drain terminal coupled to a sense terminal in the one or more sense terminals, and a gate terminal configured to receive a bias voltage.
Circuitry comprising:
- an oscillator having at least two different types of passive electrical components;
- and
- fin field-effect transistor (FinFET) circuitry coupled between the oscillator and an output of the circuitry.
Dependencies are inferred from the claim text.