Radiation source and a method for generating electromagnetic radiation at a plurality of frequencies

3:

• The radiation source according to claim 1, wherein the initial source comprises a pump laser and an optical parametric oscillator,
• wherein the pump laser is arranged to generate electromagnetic pump radiation during operation of the radiation source,
• wherein the optical parametric oscillator is located in a beam path of the pump radiation, and
• wherein the optical parametric oscillator is arranged to generate signal radiation comprising a signal centre frequency and Idler radiation from the pump radiation during operation of the radiation source such that the signal radiation is the initial radiation.

5:

• The radiation source according to claim 1, wherein the radiation source comprises a modulator
• wherein the modulator is located in the beam path of the initial radiation between the optical parametric oscillator and the frequency converter,
• wherein the modulator is arranged to impose a phase modulation with a modulation frequency on the initial radiation, and
• wherein the controller is arranged to perform in the first mode of operation the steps of
• i) mixing the conversion measurement signal with a reference signal modulated at the modulation frequency to form a mixed signal comprising a non-modulated term and a term modulated at twice the modulation frequency,
• ii) filtering the mixed signal to produce an error signal containing only the non-modulated term;
• and
• iii) generating the conversion control signal such that the error signal is minimised.

7:

• The radiation source according to claim 1, wherein the radiation source comprises an initial radiation detector, wherein the initial radiation detector is located in the beam path of the initial radiation in front of the coupling mirror in the beam direction, such that the initial radiation detector detects a measure of the power of the initial radiation during operation of the radiation source and outputs an initial radiation measurement signal representing the measure of the power of the initial radiation,
• wherein the controller is connected to the initial radiation detector such that the controller receives the initial radiation measurement signal during operation of the radiation source,
• wherein the controller is connected to the initial source such that the initial source receives an initial radiation control signal from the controller during operation of the radiation source, and
• wherein the controller is arranged to generate the initial radiation control signal during operation of the radiation source in dependence on the initial radiation measurement signal such that a power of the initial radiation is controlled such that the power is substantially equal to a predetermined target power.

8:

• The radiation source according to claim 7, wherein the initial source comprises a pump laser and an optical parametric oscillator,
• wherein the pump laser is arranged to generate electromagnetic pump radiation during operation of the radiation source,
• wherein the optical parametric oscillator is located in a beam path of the pump radiation,
• wherein the optical parametric oscillator is arranged to generate signal radiation comprising a signal centre frequency and Idler radiation from the pump radiation during operation of the radiation source such that the signal radiation is the initial radiation, and
• wherein the controller is connected to the pump laser such that the pump laser receives the initial radiation control signal from the controller during operation of the radiation source, and wherein the controller is arranged such, that during operation of the radiation source the controller generates the initial radiation control signal in dependence on the initial radiation measurement signal such that a pumping power of the pumping radiation is controlled such that the pumping power is substantially equal to a predetermined desired pumping power.

10:

• A method for generating electromagnetic radiation at a plurality of frequencies, wherein the method comprises the steps of
• generating electromagnetic initial radiation comprising an initial centre frequency by an initial radiation source;
• coupling the initial radiation through a coupling mirror into a converter resonator resonant for the initial radiation;
• generating converted radiation at a converted frequency from the initial radiation in a non-linear optical crystal arranged in the converter resonator, wherein the converted frequency is different from a frequency of the initial radiation;
• detecting a measure of the power of the converted radiation with a conversion detector arranged in a beam path of the converted radiation or in the beam path of the initial radiation in the beam direction behind the coupling mirror;
• in a first operating mode, controlling a resonance frequency of the converter resonator as a function of the measure of the power of the converted radiation, so that the resonance frequency follows the initial centre frequency;
• selectively switching between the first mode of operation and a second mode of operation;
• in the second mode of operation, controlling the power of the converted radiation such that either the power of the converted radiation has a smaller relative variation over time than the power of the initial radiation in the beam direction in front of the coupling mirror or the power of the initial radiation in the beam direction behind the coupling mirror has a smaller relative variation over time than the power of the initial radiation in the beam direction in front of the coupling mirror.