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US 2024/0124635 A1Published application
Polymer, resist composition including the same, and method of forming pattern using the resist composition
AssigneeSamsung Electronics Co., Ltd.
InventorsMinsang KIM, Haengdeog KOH, Yoonhyun KWAK, Beomseok KIM, Chanjae AHN, Jungha CHAE, Sungwon CHOI
Life of this patent
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Abstract
Provided are a polymer, a resist composition including the same, and a method of forming a pattern using the resist composition, the polymer including one or more of a first repeating unit represented by Formula 1 and a second repeating unit represented by Formula 2, and free of a repeating unit of which a structure changes by an acid: In Formulae 1 and 2, R11 to R16, b12, X−, R21 to R24, b22, and Y are as described in the specification.
Claims20
A polymer comprising:
- at least one of a first repeating unit represented by Formula 1 or a second repeating unit represented by Formula 2, and being free of a repeating unit of which a structure changes by an acid:
- wherein, in Formulae 1 and 2,
- R11 and R21 are each independently hydrogen, deuterium, halogen, a C1-C6 linear or branched alkyl group, or a halogenated C1-C6 linear or branched alkyl group;
- R12 to R14 and R22 to R24 are each independently hydrogen, deuterium, halogen, or a linear, branched, or cyclic monovalent C1-C20 hydrocarbon group optionally containing a heteroatom;
- b12 and b22 are each independently integers of 1 to 4;
- R15 and R16 are each independently a linear, branched, or cyclic monovalent C1-C20 hydrocarbon group optionally containing a heteroatom, and R15 and R16 optionally bond together to form a ring;
- X− is a counter ion;
- Y is at least one of a halogen, R18SO3, R18CO2, R18PO4, or NO3;
- R18 is a linear, branched, or cyclic monovalent C1-C20 hydrocarbon group optionally containing a heteroatom;
- and
- * and *′ are each a bonding site with a neighboring atom.
8 more elements
Dependencies are inferred from the claim text.