Device for measuring and/or modifying a surface

A device for measuring or modifying a surface of a sample, the device comprising:

• a support,
• a sample holder, the sample holder comprising a first area and at least a second area, the first area being configured to receive the sample, the sample being fixedly mounted to the first area, the second area being distinct from the first area, the second area being fixed relative to the support, the sample holder being deformable so as to allow relative displacement of the first area relative to the second area,
• a detector configured to detect a displacement of the first area relative to the second area,
• at least one of a hybrid probe and a set of probes,
• i) the hybrid probe being configured to detect a first parameter at a point of the surface when the hybrid probe faces the point, the hybrid probe being configured to generate a first measurement signal representative of the first parameter, the hybrid probe being configured to detect a second parameter at the point of the surface, the first parameter being different from the first parameter, the hybrid probe being configured to generate a second measurement signal representative of the second parameter, the first parameter being different from the second parameter,
• ii) the set of probes comprising a first probe and a second probe, the first probe being different from the hybrid probe, the second probe being different from the hybrid probe, the set of probes being configured in a first configuration or a second configuration, so that
• in the first configuration the first probe is configured to detect a first parameter at the point of the surface when the first probe faces the point, the first probe being configured to generate the first measurement signal representative of the first parameter, the second probe being configured to detect the second parameter at the point of the surface when the second probe faces the point, the second probe being configured to generate the second measurement signal representative of the second parameter,
• and
• in the second configuration, one of the first probe and the second probe is configured to modify a third parameter of the surface at the point of the surface,
• the device comprising a displacer configured to position the hybrid probe or the first probe and the second probe facing a plurality of points of the surface, so that a plurality of first signals and a plurality of second signals are generated
• by the hybrid probe when the hybrid probe is positioned successively facing each point of the plurality of points, or
• by the first probe and by the second probe when the first probe and the second probe are each positioned successively facing each point of the plurality of points,
• the device comprising a processing module configured to determine a property of the surface at of the surface based on the plurality of first signals and the plurality of second signals.