Inspection apparatus and inspection system
AssigneeFUJIFILM Business Innovation Corp.
InventorsKiyofumi AIKAWA, Kaito TASAKI, Yoshitaka KUWADA
Life of this patent
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Abstract
An inspection apparatus includes a limiting unit that is provided between a light source and a target region and limits light traveling from the light source toward the target region, and an imaging unit that captures an image using light passing through the limiting unit, reflected from the target region, and incident on the imaging unit. The limiting unit allows light, which travels in one direction and is incident on the imaging unit in a case where the light is specularly reflected from the target region, to pass and allows at least a part of light, which travels in other directions, not to pass, among light emitted from the light source.
Claims12
An inspection apparatus comprising:
- a limiting unit that is provided between a light source and a target region and limits light traveling from the light source toward the target region;
- and
- an imaging unit that captures an image using light passing through the limiting unit, reflected from the target region, and incident on the imaging unit,
- wherein the limiting unit allows light, which travels in one direction and is incident on the imaging unit in a case where the light is specularly reflected from the target region, to pass and allows at least a part of light, which travels in other directions, not to pass, among light emitted from the light source.
An inspection system comprising:
- a limiting unit that is provided between a light source and a target region and limits light traveling from the light source toward the target region;
- an imaging unit that captures an image using light passing through the limiting unit, reflected from the target region, and incident on the imaging unit;
- and
- a processor that is configured to process the image captured by the imaging unit,
- wherein the limiting unit allows light, which travels in one direction and is incident on the imaging unit in a case where the light is specularly reflected from the target region, to pass and allows at least a part of light, which travels in other directions, not to pass, among light emitted from the light source.
An inspection apparatus comprising:
- limiting means provided between a light source and a target region and for limiting light traveling from the light source toward the target region;
- and
- imaging means for capturing an image using light passing through the limiting means, reflected from the target region, and incident on the imaging means,
- wherein the limiting means allows light, which travels in one direction and is incident on the imaging means in a case where the light is specularly reflected from the target region, to pass and allows at least a part of light, which travels in other directions, not to pass, among light emitted from the light source.
Dependencies are inferred from the claim text.