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US 2024/0113682 A1Published application
Acoustic wave device
AssigneeMurata Manufacturing Co., Ltd.
InventorSho NAGATOMO
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Abstract
An acoustic wave device includes a piezoelectric material layer, and an IDT electrode on the piezoelectric material layer and including first electrode fingers and second electrode fingers arranged periodically. The electrode fingers each include at least one electrode layer including at least one of Nb, Pd, or Ni. A sum of thicknesses of the at least one electrode layer, calculated assuming that the electrode layer(s) includes Mo and based on a density ratio between the electrode layer(s) and Mo, is at least about 10% of a spatial period of the electrode fingers.
Claims20
An acoustic wave device comprising:
- a piezoelectric material layer;
- and
- an IDT electrode on the piezoelectric material layer and including a plurality of electrode fingers arranged periodically;
- wherein
- the electrode fingers each include at least one electrode layer including at least one of Nb, Pd, or Ni;
- and
- a sum of thicknesses of the at least one electrode layer, calculated assuming that the at least one electrode layer includes Mo and based on a density ratio between the at least one electrode layer and Mo, is at least about 10% of a spatial period of the electrode fingers.
4 more elements
Dependencies are inferred from the claim text.