Methods and systems for producing composite crystals
AssigneeMeishan Boya Advanced Materials Co., Ltd.
InventorsYu WANG, Zhenxing LIANG, Min LI, Peng GU
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Abstract
The present disclosure provides a method for producing a composite crystal, the method is performed in a multi-chamber growth device, and the multi-chamber growth device includes a plurality of chambers. The method includes conveying and processing at least one substrate between a plurality of chambers and obtaining at least one composite crystal by growing a target crystal through vapor deposition in one of the plurality of chambers, the at least one composite crystal including the at least one substrate and the target crystal.
Claims21
A method for producing a composite crystal, the method being executed in a multi-chamber growth device, the multi-chamber growth device including a plurality of chambers and conveyance assemblies in the plurality of chambers respectively, comprising:
- conveying and processing at least one substrate between the plurality of chambers, successively, wherein the conveyance assemblies in the plurality of chambers are connected successively in a head-tail-head-tail manner;
- and
- in one of the plurality of chambers, obtaining at least one composite crystal by growing a target crystal through vapor deposition, the at least one composite crystal including the at least one substrate and the target crystal.
A system for producing a composite crystal applied to a crystal production process, comprising:
- at least one storage device including a set of instructions;
- and
- at least one processor in communication with the at least one storage device, wherein when executing the set of instructions, the at least one processor is configured to direct the system to perform operations including:
- conveying and processing at least one substrate between a plurality of chambers, successively, wherein conveyance assemblies in the plurality of chambers are connected successively in a head-tail-head-tail manner;
- and
- in one of the plurality of chambers, obtaining at least one composite crystal by growing a target crystal through vapor deposition, the at least one composite crystal including the at least one substrate and the target crystal.
A non-transitory computer readable medium, comprising executable instructions that, when executed by at least one processor, direct the at least one processor to perform operations including:
- conveying and processing at least one substrate between a plurality of chambers, successively, wherein conveyance assemblies in the plurality of chambers are connected successively in a head-tail-head-tail manner;
- and
- in one of the plurality of chambers, obtaining at least one composite crystal by growing a target crystal through vapor deposition, the at least one composite crystal including the at least one substrate and the target crystal.
21-29. (canceled)
Dependencies are inferred from the claim text.