Spring Supported and Sealed MEMS Diaphragm Assembly
AssigneeKnowles Electronics, LLC
InventorsPeter V. Loeppert, Michael Pedersen
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Abstract
A method of fabricating a die for a microelectromechanical systems (MEMS) microphone includes the steps of forming a diaphragm, etching a plurality of slots through the diaphragm to define a plurality of springs, releasing the diaphragm and the plurality of springs, wherein the plurality of springs relieves intrinsic stress of the diaphragm, and sealing the plurality of slots with sealing material, thereby disabling the springs.
Claims12
A method of fabricating a die for a microelectromechanical systems (MEMS) microphone, the method comprising:
- forming a diaphragm;
- etching a plurality of slots through the diaphragm to define a plurality of springs;
- releasing the diaphragm and the plurality of springs, wherein the plurality of springs relieves intrinsic stress of the diaphragm;
- and
- sealing the plurality of slots with sealing material, thereby disabling the springs.
A method of fabricating a die for a microelectromechanical systems (MEMS) microphone, the method comprising:
- forming an assembly comprising a first diaphragm, a second diaphragm parallel to and spaced apart from the first diaphragm, and a rigid central layer disposed between the first and second diaphragms;
- etching a first plurality of slots through an outer region of the first diaphragm to define a first plurality of springs;
- etching a second plurality of slots through an outer region of the second diaphragm to define a second plurality of springs;
- releasing the assembly, wherein the first plurality of springs relieves intrinsic stress of the first diaphragm and the second plurality of springs relieves intrinsic stress of the second diaphragm;
- and
- sealing the first and second pluralities of slots with sealing material, thereby disabling the first and second pluralities of springs.
Dependencies are inferred from the claim text.