US 2024/0103482 A1 · TEMPERATURE CONTROL METHOD

Abstract

A temperature control method of controlling a temperature of a semiconductor wafer mounted on a mounting table includes a supply process of supplying, in a state that a supply of a power to a heater configured to heat the mounting table is stopped or the power is maintained to be constant, a heat transfer gas into a gap between the semiconductor wafer and the mounting table; a measurement process of measuring a temperature variation of the mounting table due to heat exchange between the semiconductor wafer and the mounting table through the heat transfer gas; a calculation process of calculating a correction value based on the temperature variation of the mounting table; and a control process of starting the supply of the power and controlling the power such that the temperature of the mounting table reaches a target temperature corrected with the correction value.

Claims16

Dependent claims

A temperature control method comprising:

(a) providing a substrate on a substrate support surface of a substrate support, the substrate having a temperature different from a temperature of the substrate support;
(b) supplying, in a state that a supply of a power to at least one heater configured to heat the substrate support is stopped or in a state that the power supplied to the at least one heater is maintained to be constant, a heat transfer gas into a gap between a rear surface of the substrate and the substrate support surface through one or more supply holes positioned within the substrate support surface;
(c) measuring a temperature variation of the substrate support due to heat exchange between the substrate and the substrate support through the heat transfer gas;
(d) calculating a correction value based on the temperature variation of the substrate support;
and
(e) controlling the power to the at least one heater such that the temperature of the substrate support reaches a target temperature corrected with the correction value.

3 more elements

Dependencies are inferred from the claim text.

Temperature control method

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Temperature control method

Life of this patent

Abstract

Claims16