Mems resonator sensor substrate for plasma, temperature, stress, or deposition sensing
AssigneeApplied Materials, Inc.
InventorsCHUANG-CHIA LIN, DAVID PETERSON, PHILIP ALLAN KRAUS, AMIR BAYATI
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Abstract
Embodiments disclosed herein include diagnostic substrates and methods of using the diagnostic substrates to extract plasma parameters. In an embodiment, a diagnostic substrate comprises a substrate and an array of resonators across the substrate. In an embodiment, the array of resonators comprises at least a first resonator with a first structure and a second resonator with a second structure. In an embodiment, the first structure is different than the second structure.
Claims13
A method of measuring a plasma parameter in a plasma chamber, comprising:
- providing a diagnostic substrate in the plasma chamber, wherein the diagnostic substrate comprises a first resonator with a first geometry and a second resonator with a second geometry;
- measuring a baseline response from the first resonator and the second resonator in a vacuum without a plasma;
- striking the plasma in the plasma chamber, wherein the first resonator and the second resonator are within the plasma;
- measuring a first resonance frequency of the first resonator and a second resonance frequency of the second resonator;
- and
- extracting the plasma parameter or a wafer parameter from the first resonance frequency and the second resonance frequency.
A method of fabricating a diagnostic substrate, the method comprising:
- providing a substrate;
- and
- forming an array of resonators across the substrate, wherein the array of resonators comprises at least a first resonator with a first structure and a second resonator with a second structure, wherein the first structure has a diameter different than a diameter of the second structure, wherein the first structure comprises a first membrane resonating member having a bottom surface a first distance from the substrate, and wherein the second structure comprises a second membrane resonating member having a bottom surface a second distance from the substrate, wherein the first distance is different than the second distance.
Dependencies are inferred from the claim text.