US 2024/0102860 A1 · Six-degree-of-freedom error correction method and apparatus

Abstract

An apparatus includes a six-axis correction stage, an auto-collimation measurement device, a light splitter, a telecentric image measurement device, and a controller. The six-axis correction stage carries a device under test; the auto-collimation measurement device is arranged above the six-axis correction stage along a measurement optical axis; the light splitter is arranged on the measurement optical axis and is interposed between the six-axis correction stage and the auto-collimation measurement device. A method controls the six-axis correction stage to correct rotation errors in at least two degrees of freedom of the device under test according to a measurement result of the auto-collimation measurement device, and controls the six-axis correction stage to correct translation and yaw errors in at least three degrees of freedom of the device under test according to a measurement result of the telecentric image measurement device by means of the controller.

Claims10

Dependent claims

A six-degree-of-freedom error correction apparatus, comprising:

a six-axis correction stage, for carrying a device under test;
an auto-collimation measurement device, arranged above the six-axis correction stage along a measurement optical axis;
a light splitter, arranged on the measurement optical axis and interposed between the six-axis correction stage and the auto-collimation measurement device;
a telecentric image measurement device, arranged on one side of the measurement optical axis and corresponding to the light splitter;
and
a controller, electrically connected to the six-axis correction stage, the auto-collimation measurement device, and the telecentric image measurement device,
wherein the controller controls the six-axis correction stage to correct rotation errors in at least two degrees of freedom of the device under test according to a measurement result of the auto-collimation measurement device, and controls the six-axis correction stage to correct translation and yaw errors in at least three degrees of freedom of the device under test according to a measurement result of the telecentric image measurement device.

4 more elements

A six-degree-of-freedom error correction method, comprises the steps of:

(A) controlling a six-axis correction stage to correct rotation errors in at least two degrees of freedom of a device under test according to a measurement result of an auto-collimation measurement device by using a controller, wherein the device under test is place on the six-axis correction stage;
the auto-collimation measurement device is arranged above the six-axis correction stage along a measurement optical axis;
and
(B) controlling the six-axis correction stage to correct translation and yaw errors in at least three degrees of freedom of the device under test according to a measurement result of a telecentric image measurement device by using the controller, wherein the telecentric image measurement device is arranged on one side of the measurement optical axis and corresponds to a light splitter, which is arranged on the measurement optical axis and is interposed between the six-axis correction stage and the auto-collimation measurement device.

1 more element

Dependencies are inferred from the claim text.

Six-degree-of-freedom error correction method and apparatus

Life of this patent

Six-degree-of-freedom error correction method and apparatus

Life of this patent

Abstract

Claims10