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US 2024/0101446 A1Published application
Vaporizer and vaporization supply device
AssigneeFujikin Incorporated
InventorsIchiro TOKUDA, Mizuki NAKAGAWA, Keiji HIRAO, Yukio MINAMI
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Abstract
A vaporizer 10 comprises: a vaporization chamber 12 for storing a liquid; a bottom heater 14B provided in the vaporization chamber 12 which includes a winding portion 141, acting as a heat source, to contact with the liquid stored in the vaporization chamber and an upright portion 142 erected from the winding portion and having an end portion with a heater terminal 143; and a relief valve 16 connected to the vaporization chamber 12. The vaporizer 10 is configured to be able to appropriately vaporize and supply ultrapure water.
Claims7
A vaporizer comprising:
- a vaporization chamber for storing a liquid;
- a bottom heater provided in the vaporization chamber, the bottom heater including a winding portion acting as a heat source arranged so as to contact with the liquid stored in the vaporization chamber, and an upright portion erected from the winding portion and having an end portion with a heater terminal;
- and
- a relief valve connected to the vaporization chamber.
1 more element
Dependencies are inferred from the claim text.