Mems device
AssigneeRohm Co., Ltd.
InventorsDaisuke NISHINOHARA, Hideaki HASHIMOTO, Toma FUJITA
Life of this patent
Estimating the term…
Abstract
The present disclosure provides a MEMS device having a movable portion. The MEMS device includes: a substrate; a recess, disposed in the substrate; the movable portion, hollowly supported in the recess; and a bump stop, hollowly supported in the recess and configured to restrict a movement of the movable portion by contacting the movable portion. The bump stop includes: a protruding portion, configured to contact the movable portion; and a shock absorbing portion, disposed between the protruding portion and the substrate and configured to absorb at least a part of an impact force applied to the protruding portion by elastic deformation.
Claims9
A MEMS device having a movable portion, comprising:
- a substrate;
- a recess, disposed in the substrate;
- the movable portion, hollowly supported in the recess;
- and
- a bump stop, hollowly supported in the recess and configured to restrict a movement of the movable portion by contacting the movable portion, wherein the bump stop includes:
- a protruding portion, configured to contact the movable portion;
- and
- a shock absorbing portion, disposed between the protruding portion and the substrate and configured to absorb at least a part of an impact force applied to the protruding portion by elastic deformation.
A MEMS device having a movable portion, comprising:
- a substrate;
- a recess, disposed in the substrate;
- the movable portion, hollowly supported in the recess;
- a first bump stop, hollowly supported in the recess and configured to be elastically deformed by contacting the movable portion to absorb at least a part of an impact force applied from the movable portion;
- and
- a second bump stop, hollowly supported in the recess and configured to restrict a movement of the movable portion by contacting the movable portion, wherein
- a distance between the movable portion and the first bump stop is less than a distance between the movable portion and the second bump stop.
Dependencies are inferred from the claim text.