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US 2024/0083740 A1Published application
MEMS Element and Vibration-Driven Energy Harvesting Device
AssigneeKabushiki Kaisha Saginomiya Seisakusho
InventorsHisayuki Ashizawa, Noriko Shimomura
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Abstract
A MEMS element according to the present invention is provided with a base, an insulation layer fixed to one surface of the base, a first upper layer at least portions of which are fixed to the insulation layer, and a second upper layer provided surrounding the first upper layer and disposed being separated from the first upper layer by slits, wherein the first upper layer includes, at predetermined portions, protruding portions protruding toward the second upper layer, and the protruding portions are fixed to the insulation layer.
Claims8
A MEMS element comprising:
- a base;
- an insulation layer fixed to one surface of the base;
- a first upper layer at least portions of which are fixed to the insulation layer;
- and
- a second upper layer provided surrounding the first upper layer and disposed being separated from the first upper layer by slits, wherein
- the first upper layer includes, at predetermined portions, protruding portions protruding toward the second upper layer, and
- the protruding portions are fixed to the insulation layer.
4 more elements
Dependencies are inferred from the claim text.