Bolometer and manufacturing method of temperature sensing unit

A manufacturing method of a temperature sensing unit, comprising:

• forming a thermistor on a first insulating layer;
• forming a first portion of a second insulating layer on the thermistor, wherein the first portion covers the thermistor;
• forming an electrode layer on the first portion, wherein the electrode layer is right above the thermistor, the first portion is exposed between a plurality of electrodes of the electrode layer;
• forming a second portion of the second insulating layer on the electrode layer, wherein the second portion covers the electrode layer and the first portion;
• forming a metal meta-surface on the second portion, wherein the metal meta-surface is right above the thermistor;
• and
• forming a third portion of the second insulating layer on the metal meta-surface, wherein the third portion covers the metal meta-surface and the second portion.