Semiconductor manufacturing apparatus
AssigneeNextin, Inc.
InventorsSeoung-Ju Na, Heung-Gyoon PARK, Keun Young LIM, Moo Hwan KIM
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Abstract
A semiconductor manufacturing apparatus according to an embodiment of the present invention comprises: an ultraviolet generating part which is disposed in an ultraviolet generating chamber and generates ultraviolet rays of a target wavelength; a substrate driving part including a chuck which is disposed in a process chamber where a substrate fed therein is treated with ultraviolet rays and supports the fed substrate, and an axis which rotates and moves up and down the chuck; and a window which is disposed between the ultraviolet generating chamber and the process chamber and transmits the generated ultraviolet rays to the process chamber.
Claims12
A semiconductor manufacturing apparatus, comprising:
- an ultraviolet generating part disposed in an ultraviolet generating chamber to generate ultraviolet rays of a target wavelength;
- a substrate driving part including a chuck disposed in a process chamber where a loaded substrate is treated with the ultraviolet rays to support the loaded substrate, and a shaft configured to rotate the chuck;
- and
- a window disposed between the ultraviolet generating chamber and the process chamber to transmit the generated ultraviolet rays to the process chamber.
A semiconductor manufacturing apparatus, comprising:
- an ultraviolet generating part disposed in an ultraviolet generating chamber to generate ultraviolet rays of a target wavelength;
- a substrate driving part including a chuck disposed in a process chamber where a loaded substrate is treated with the ultraviolet rays to support the loaded substrate, and a shaft configured to rotate the chuck;
- a window disposed between the ultraviolet generating chamber and the process chamber to transmit the generated ultraviolet rays to the process chamber;
- and
- a grid plate configured to accelerate and provide charged particles to the substrate,
- wherein the grid plate includes a plurality of electrode lines having different radii, and a grid electrode in which a plurality of holes are respectively formed in the electrode lines.
Dependencies are inferred from the claim text.