Encapsulated mems device and method for manufacturing the mems device

An encapsulated MEMS device, comprising:

• a cavity structure having an inner volume including a plurality of MEMS elements displaceable with respect to each other, and the cavity structure having an opening structure to the inner volume;
• a Self-Assembled Monolayer on exposed surfaces within the inner volume of the cavity structure;
• and
• a closing structure on the opening structure for hermetically closing the cavity structure.

An encapsulated MEMS device, comprising:

• a cavity structure having an inner volume including a plurality of MEMS elements displaceable with respect to each other, and the cavity structure having an opening structure to the inner volume;
• a Self-Assembled Monolayer on exposed surfaces within the inner volume of the cavity structure;
• and
• a sealing layer on the opening structure to allow a different pressure within the cavity compared to an ambient pressure outside the cavity.