Charged Particle Beam Device

A charged particle beam device that irradiates a sample with a charged particle beam, the charged particle beam device comprising:

• a detector configured to irradiate the sample with the charged particle beam to detect secondary charged particles generated from the sample and to output a detection signal representing a signal intensity of the secondary charged particles;
• and
• an arithmetic unit configured to generate an observation image of the sample using the detection signal, wherein
• the arithmetic unit specifies irradiation conditions of the charged particle beam where a charged state of the sample switches between positive charge and negative charge, and
• the arithmetic unit adjusts the irradiation conditions according to a first relationship between the specified irradiation conditions and the irradiation conditions where the observation image is acquired.