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US 2024/0061394 A1Published application
Systems and methods for reducing vibrational disturbances
AssigneeNikon Corporation
InventorMatthew Parker-McCormick Bjork
Life of this patent
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Abstract
The problem of addressing vibrational disturbances in mechanical positioning systems is addressed by systems and methods that use a combination of active vibration dampening and passive vibration dampening. A system described herein generally comprises a mechanical positioning system; a payload; and a vibration dampening module coupled to the mechanical position system and to the payload. The vibration dampening module generally comprises an active vibration dampener and/or a passive vibration dampener.
Claims26
1-20. (canceled)
A system comprising:
- a vibration dampening module,
- wherein the vibration dampening module comprises an active vibration dampener and a passive vibration dampener,
- wherein the vibration dampening module is coupled to a mechanical positioning system and a payload, and
- wherein the vibration dampening module is configured to operate in two or more different directions.
1 more element
Dependencies are inferred from the claim text.