Angular Velocity Sensor, Electronic Apparatus, And Vehicle
AssigneeSeiko Epson Corporation
InventorsKazuyuki NAGATA, Takayuki KIKUCHI
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Abstract
An angular velocity sensor includes a substrate, a detector including a movable detection electrode and a fixed detection electrode opposed to the movable detection electrode, and a driver adapted to drive the detector. The movable detection electrode is supported by a first spring that is elongated parallel to a Y axis from a first turned-back part, and a second spring that is elongated parallel to the Y axis from a second turned-back part. The first and second springs are fixed at first and second anchors. The first turned-back part is closer to the second spring than the first anchor. The detector includes a first surface opposed to the first spring, and a second surface disposed closer to the first spring than the first surface.
Claims13
A gyro sensor comprising:
- three mutually orthogonal axes being defined as an X-axis, a Y-axis, and a Z-axis;
- a substrate;
- and
- an element section that is supported on the upper surface of the substrate located on the positive side of the Z axis and detects an angular velocity based on a change in capacitance, wherein
- the element section comprises:
- a first electrode including a first trunk part, and a plurality of first electrode fingers extending in the X-axis direction along the X-axis from a first edge of the first trunk on the positive side of the X-axis, and arranged in line in the Y-axis direction along the Y-axis;
- a spring extending in the Y-axis direction, wherein
- the first trunk part includes a first surface facing the spring at a second edge on the negative side of the X axis;
- and
- in a plan view from the Z-axis direction, the first surface includes a slanted portion that is slanted with respect to the extending direction of the spring.
Dependencies are inferred from the claim text.