Centerfinding for a process kit or process kit carrier at a manufacturing system
AssigneeApplied Materials, Inc.
InventorsAli Utku Pehlivan, Mohsin Waqar, Paul Zachary Wirth, Todd James Brill
Life of this patent
Estimating the term…
Abstract
One or more first signals are obtained. The first signals indicate a current shape of an object placed on an end effector. The one or more first signals are compared to one or more second signals that each indicate a predefined shape for a process component on the end effector. A determination is made of whether a current placement of the object on the end effector satisfies a target placement criterion based on the comparison.
Claims20
A method comprising:
- obtaining one or more first signals each indicating a current shape of an object placed on an end effector;
- comparing the one or more first signals to one or more second signals each indicating a predefined shape for a process component on the end effector;
- and
- determining whether a current placement of the object on the end effector satisfies a target placement criterion based on the comparison.
A manufacturing system comprising:
- a robot arm comprising an end effector;
- and
- a controller operatively coupled to the robot arm, wherein the controller is to perform operations comprising:
- obtaining one or more first signals each indicating a current shape of an object placed on an end effector;
- comparing the one or more first signals to one or more second signals each indicating a predefined shape for a process component on the end effector;
- and
- determining whether a current placement of the object on the end effector satisfies a target placement criterion based on the comparison.
A non-transitory computer-readable storage medium comprising instructions that, when executed by a processing device, cause the processing device to perform operations comprising:
- obtaining one or more first signals each indicating a current shape of an object placed on an end effector;
- comparing the one or more first signals to one or more second signals each indicating a predefined shape for a process component on the end effector;
- and
- determining whether a current placement of the object on the end effector satisfies a target placement criterion based on the comparison.
Dependencies are inferred from the claim text.