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US 2024/0048899 A1Published application
Mems sound transducer
OwnerMalte Florian NIEKIEL, Fabian STOPPEL +2inventors
InventorsMalte Florian NIEKIEL, Fabian STOPPEL, Bernhard WAGNER, Fabian LOFINK
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Abstract
An MEMS sound transducer is provided, having: at least one actuator; a radiation structure coupled to the actuator and configured as a separate element; a structure surrounding the radiation structure, wherein the radiation structure is separated from the surrounding structure by one or more gaps; and at least one screen arranged along at least one of the one or more gaps.
Claims17
An MEMS sound transducer comprising:
- at least one actuator;
- a radiation structure coupled to the actuator and configured as a separate element;
- a structure surrounding the radiation structure, wherein the radiation structure is separated from the surrounding structure by one or more gaps;
- and
- at least one screen arranged along at least one of the one or more gaps,
- wherein the at least one screen is formed as part of the radiation structure.
3 more elements
An MEMS sound transducer comprising:
- at least one actuator;
- a radiation structure coupled to the actuator and configured as a separate element;
- a structure surrounding the radiation structure, wherein the radiation structure is separated from the surrounding structure by one or more gaps;
- and
- at least one screen arranged along at least one of the one or more gaps,
- wherein the at least one screen is formed as part of the surrounding structure and by a cavity of the surrounding structure;
- and wherein the at least one screen extends out of a substrate plane or perpendicularly out of a substrate plane, and wherein the at least one screen extends an edge of the cavity.
4 more elements
Dependencies are inferred from the claim text.