Acceleration sensor

Abstract

An acceleration sensor includes a semiconductor substrate that has a cavity formed in an interior, a fixed structure that includes a fixed electrode supported by the semiconductor substrate in a state of floating with respect to the cavity, and a movable structure that includes a movable electrode supported by the semiconductor substrate via an elastic structure in a state of floating with respect to the cavity and displacing with respect to the fixed electrode. The elastic structure includes a first end portion supported by the semiconductor substrate, a second end portion connected to the movable structure, and an intermediate portion connecting the first end portion and the second end portion and has a rectilinearly-extending rectilinear portion at least at a portion of the intermediate portion and the rectilinear portion includes a plurality of rectilinear frames extending in parallel to each other in a direction in which the rectilinear portion extends.

Dependencies are inferred from the claim text.