Inspection system
AssigneeTokyo Electron Limited
InventorsTomoya ENDO, Kentaro Konishi, Yuki Ishida, Jun Fujihara
Life of this patent
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Abstract
There is an inspection system including multiple inspection units configured to inspect substrates, wherein each of the inspection units includes: a tester configured to inspect a substrate; a moving part configured to hold and move the substrate relative to the tester; and a frame structure configured to accommodate the tester and the moving part, wherein the frame structure of one inspection unit includes: a first frame to be connected to a frame structure of another inspection unit; and a second frame that accommodates at least the moving part and is configured to move relative to the first frame to extract the moving part from the first frame.
Claims10
An inspection system including multiple inspection units configured to inspect substrates,
- wherein each of the inspection units includes:
- a tester configured to inspect a substrate;
- a moving part configured to hold and move the substrate relative to the tester;
- and
- a frame structure configured to accommodate the tester and the moving part,
- wherein the frame structure of one inspection unit includes:
- a first frame to be connected to a frame structure of another inspection unit;
- and
- a second frame that accommodates at least the moving part and is configured to move relative to the first frame to extract the moving part from the first frame.
Dependencies are inferred from the claim text.