Generating inductively coupled plasma
AssigneePerkinElmer U.S. LLC
InventorPeter Morrisroe
Life of this patent
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Abstract
An inductively coupled plasma (ICP) generator includes a torch, an induction device, and an ignition system. The induction device is configured to be supplied with radio-frequency electric current to inductively energize a plasma gas flowed through the torch to produce a plasma. The ignition system includes a high voltage source. The ignition system is configured to: direct a flow of an ignition gas onto the torch; and generate an ignition electric arc in the ignition gas flow using the high voltage source; whereby the ignition electric arc is transmitted to the torch through the ignition gas flow to ionize the plasma gas in the torch.
Claims30
An inductively coupled plasma (ICP) generator comprising:
- a torch;
- an induction device configured to be supplied with radio-frequency electric current to inductively energize a plasma gas flowed through the torch to produce a plasma;
- and
- an ignition system including a high voltage source, wherein the ignition system is configured to:
- direct a flow of an ignition gas onto the torch;
- and
- generate an ignition electric arc in the ignition gas flow using the high voltage source;
- whereby the ignition electric arc is transmitted to the torch through the ignition gas flow to ionize the plasma gas in the torch.
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A method for generating an inductively coupled plasma (ICP), the method comprising:
- flowing a plasma gas through a torch;
- directing a flow of an ignition gas onto the torch;
- generating an ignition electric arc in the ignition gas flow using a high voltage source, whereby the ignition electric arc is transmitted to the torch through the ignition gas flow to ionize the plasma gas in the torch;
- and
- supplying a radio-frequency electric current to an induction device to inductively energize the plasma gas flowing through the torch to produce a plasma.
An inductively coupled plasma (ICP) generator comprising:
- a torch including a plasma tube configured to receive a flow of a plasma gas;
- an induction device configured to be supplied with radio-frequency electric current to inductively energize the plasma gas flowed through the plasma tube to produce a plasma;
- and
- an ignition system including:
- a direct current (DC) high voltage source;
- and
- an ignition electrode spaced apart from the plasma tube by a gap;
- wherein the ignition system is configured to generate an ignition DC electric arc across the gap to the plasma tube using the DC high voltage source to thereby ionize the plasma gas in the torch.
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Dependencies are inferred from the claim text.