Dual-operating accelerometer
AssigneeSTMicroelectronics S.r.l.
InventorsFrancesco RIZZINI, Nicolo' MANCA, Cristian DALL'OGLIO
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Abstract
The present disclosure is directed to micro-electromechanical system (MEMS) accelerometers that are configured for a user interface mode and a true wireless stereo (TWS) mode of an audio device. The accelerometers are fabricated with specific electromechanical parameters, such as mass, stiffness, active capacitance, and bonding pressure. As a result of the specific electromechanical parameters, the accelerometers have a resonance frequency, quality factor, sensitivity, and Brownian noise density that are suitable for both the user interface mode and the TWS mode.
Claims20
A device, comprising:
- a first accelerometer including:
- a first sensing mass having a mass between 12 and 13 microgram;
- and
- a first plurality of electrodes configured to be capacitively coupled to the first sensing mass with a capacitance between 250 and 450 femtofarad;
- and
- a second accelerometer including:
- a second sensing mass having a mass between 24 and 28 microgram;
- and
- a second plurality of electrodes configured to be capacitively coupled to the second sensing mass with a capacitance between 330 and 570 femtofarad.
An accelerometer, comprising:
- a sensing mass having a mass between 12 and 13 microgram;
- and
- a plurality of electrodes configured to be capacitively coupled to the sensing mass with a capacitance between 250 and 450 femtofarad.
An accelerometer, comprising:
- a sensing mass having a mass between 24 and 28 microgram;
- and
- a plurality of electrodes configured to be capacitively coupled to the sensing mass with a capacitance between 330 and 570 femtofarad.
Dependencies are inferred from the claim text.