Panel inspection device and method for inspecting a panel
AssigneeQioptiq Photonics GmbH & Co. KG
InventorAchim Zirkel
Life of this patent
Estimating the term…
Abstract
An inspection device for inspecting a panel, in particular a display, or a PCB, includes a first mirror, a second mirror, a third mirror, and a sensor. The first mirror, the second mirror, and the third mirror are arranged to display a section of the panel to be inspected on the sensor with a magnification factor greater than one. At least two of the group of the first mirror, the second mirror, and the third mirror, have both a first type of curvature, and a remaining mirror has a second type of curvature, opposite to the first type of curvature. The first mirror, the second mirror, and the third mirror form a telecentric system which is telecentric on a panel facing side and/or on a sensor facing side.
Claims19
An inspection device for inspecting a panel, in particular a display or a PCB, comprising:
- a first mirror, a second mirror, a third mirror, and a sensor, wherein the first mirror, the second mirror, and the third mirror are arranged to display a section of the panel to be inspected on the sensor with a magnification factor M>1, and wherein at least two of the group of the first mirror, the second mirror, and the third mirror, have both a first type of curvature, and a remaining mirror has a second type of curvature, opposite to the first type of curvature,
- and the first mirror, the second mirror, and the third mirror form a telecentric system which is telecentric on a panel facing side and/or on a sensor facing side.
A method of inspecting a panel, comprising the steps of:
- providing a first mirror, a second mirror, a third mirror, and a sensor, wherein the first mirror, the second mirror, and the third mirror have a combined magnification factor M greater than one and are arranged to convey an image of a section of the panel to be inspected on the sensor, and wherein at least two of the group of the first mirror, the second mirror, and the third mirror, have both a first type of curvature, and the remaining mirror has a second type of curvature, opposite to the first type of curvature;
- capturing the image of the section of the panel with the sensor;
- and
- visually displaying the section of the panel on the sensor with a magnification factor M greater than one.
Dependencies are inferred from the claim text.