Contact architecture for 2d stacked nanoribbon transistor
AssigneeIntel Corporation
InventorsAshish Verma PENUMATCHA, Kevin P. O'BRIEN, Kirby MAXEY, Carl H. NAYLOR, Chelsey DOROW, Uygar E. AVCI, Matthew V. METZ, Sudarat LEE, Chia-Ching LIN, Sean T. MA
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