Vertical cavity surface emitting laser with active layer-specific addressability
AssigneeLumentum Operations LLC
InventorBenjamin KESLER
Life of this patent
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Abstract
A vertical cavity surface emitting laser (VCSEL) may include an epitaxial structure that includes a first active layer, a second active layer, and a tunnel junction therebetween. The VCSEL may include a set of contacts that are electrically connected to the epitaxial structure. The set of contacts may include three or more contacts, and the set of contacts may be electrically separated from each other on the VCSEL. At least one contact, of the set of contacts, may be electrically connected to the epitaxial structure at a depth between the first active layer and the second active layer.
Claims20
A vertical cavity surface emitting laser (VCSEL), comprising:
- an epitaxial structure that includes a first active layer, a second active layer, a third active layer, a first tunnel junction between the first active layer and the second active layer, and a second tunnel junction between the second active layer and the third active layer;
- and
- a set of contacts that are electrically connected to the epitaxial structure,
- wherein the set of contacts includes four or more contacts,
- wherein the set of contacts are electrically separated from each other on the VCSEL, and
- wherein the set of contacts is configured to separately address at least one of the first active layer, the second active layer, or the third active layer.
A vertical cavity surface emitting laser (VCSEL) array, comprising:
- an epitaxial structure that includes a first active layer, a second active layer, a third active layer, a first tunnel junction between the first active layer and the second active layer, and a second tunnel junction between the second active layer and the third active layer;
- at least a first VCSEL and a second VCSEL defined in the epitaxial structure;
- and
- a set of contacts that are electrically connected to the epitaxial structure,
- wherein the set of contacts includes four or more contacts,
- wherein the set of contacts are electrically separated from each other on the VCSEL array, and
- wherein the set of contacts is configured to separately address at least one of the first active layer, the second active layer, or the third active layer.
Dependencies are inferred from the claim text.