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US 2023/0420533 A1Published application
Integrated circuit structures having aoi gates with routing across nanowires
AssigneeIntel Corporation
InventorsAbhishek Anil SHARMA, Wilfred GOMES, Anand S. MURTHY, Tahir GHANI, Sagar SUTHRAM
Life of this patent
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Abstract
Structures having AOI gates with routing across nanowires are described. In an example, an integrated circuit structure includes a stack of horizontal nanowires along a vertical direction. A gate stack is over the stack of horizontal nanowires and is surrounding a channel region of each of the horizontal nanowires, the gate stack having one or more cuts in the vertical direction.
Claims20
An integrated circuit structure, comprising:
- a stack of horizontal nanowires along a vertical direction;
- and
- a gate stack over the stack of horizontal nanowires and surrounding a channel region of each of the horizontal nanowires, the gate stack having one or more cuts in the vertical direction.
An integrated circuit structure, comprising:
- a stack of horizontal nanowires along a vertical direction;
- and
- a conductive contact laterally adjacent to a source or drain region of the stack of horizontal nanowires, the conductive contact having one or more cuts in the vertical direction.
A computing device, comprising:
- a board;
- and
- a component coupled to the board, the component including an integrated circuit structure, comprising:
- a stack of horizontal nanowires along a vertical direction;
- and
- a gate stack over the stack of horizontal nanowires and surrounding a channel region of each of the horizontal nanowires, the gate stack having one or more cuts in the vertical direction.
3 more elements
A computing device, comprising:
- a board;
- and
- a component coupled to the board, the component including an integrated circuit structure, comprising:
- a stack of horizontal nanowires along a vertical direction;
- and
- a conductive contact laterally adjacent to a source or drain region of the stack of horizontal nanowires, the conductive contact having one or more cuts in the vertical direction.
3 more elements
Dependencies are inferred from the claim text.