Dummy fin contact in vertically stacked transistors
AssigneeInternational Business Machines Corporation
InventorsJoshua M. Rubin, Chen Zhang, Tenko Yamashita, Brent A. Anderson
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AssigneeInternational Business Machines Corporation
InventorsJoshua M. Rubin, Chen Zhang, Tenko Yamashita, Brent A. Anderson
Estimating the term…
A plurality of transistor components, a system, and a method of forming a vertically stacked transistor structure within a wafer. The plurality of transistor components may include a first bottom transistor, where the first bottom transistor includes a channel, a gate, a source, and a drain. The plurality of transistor components may also include a first contact on top of the first bottom transistor, where the first contact is proximately connected to the first bottom transistor. The plurality of transistor components may also include a first set of stacked transistors, where the first set of stacked transistors includes a second top transistor on top of a second bottom transistor.
A plurality of transistor components, wherein the plurality of transistor components comprises:
A system comprising:
A method of forming a vertically stacked transistor structure within a wafer, the method comprising:
Dependencies are inferred from the claim text.