Polishing liquid composition for silicon oxide film
AssigneeKao Corporation
InventorsMasato SUGAHARA, Norihito YAMAGUCHI
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AssigneeKao Corporation
InventorsMasato SUGAHARA, Norihito YAMAGUCHI
Estimating the term…
In one aspect, provided is a polishing liquid composition for a silicon oxide film that is able to improve the polishing selectivity in the polishing of a silicon oxide film. An aspect of the present disclosure relates to a polishing liquid composition for a silicon oxide film. The polishing liquid composition contains cerium oxide particles (component A), a water-soluble anionic condensate (component B), and an aqueous medium. The component B is a co-condensate of monomers including a monomer (constituent monomer b1) represented by the following formula (I) and a monomer (constituent monomer b2) represented by the following formula (II). A molar ratio (%) of the constituent monomer b1 to the total of the constituent monomer b1 and the constituent monomer b2 in the component B is more than 30%.
A polishing liquid composition for a silicon oxide film comprising:
Dependencies are inferred from the claim text.