Small gap device system and method of fabrication
AssigneesSpark Thermionics, Inc., The Trustees of the University of Pennsylvania
InventorsJared William Schwede, Igor Bargatin, Samuel M. Nicaise, Chen Lin, John Provine
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Abstract
A small-gap device system, preferably including two or more electrodes and one or more spacers maintaining a gap between two or more of the electrodes. A spacer for a small-gap device system, preferably including a plurality of legs defining a mesh structure. A method of spacer and/or small-gap device fabrication, preferably including: defining lateral features, depositing spacer material, selectively removing spacer material, separating the spacer from a fabrication substrate, and/or assembling the small-gap device.
Claims1
A thermionic energy converter system, comprising:
- a first electrode comprising a first surface;
- a second electrode comprising a second surface;
- and
- a mesh spacer maintaining a gap between the first and second surfaces;
- wherein:
- the first and second surfaces are arranged facing each other across the gap;
- the mesh spacer electrically and thermally isolates the first electrode from the second electrode;
- the mesh spacer defines a mesh structure comprising a set of vertices and a set of paths connected between vertices of the set, the set of paths comprising a first path and a second path;
- the mesh spacer comprises a set of legs extending substantially along the set of paths, the set of legs comprising:
- a first leg extending substantially along the first path, the first leg comprising a first protrusion that contacts the first surface, the first protrusion protruding toward the first surface from a body of the first leg;
- and
- a second leg extending substantially along the second path, the second leg connected to the first leg via the set of legs, wherein the second leg contacts the second surface;
- and
- the mesh spacer defines a plurality of apertures between legs of the set of legs, wherein, for each aperture of the plurality, a respective first surface normal vector from the first surface to the second surface passes through the aperture and does not intersect the mesh spacer.
Dependencies are inferred from the claim text.