Charged Particle Beam Apparatus and Report Creation Method

A charged particle beam apparatus comprising:

• an image acquisition device configured to acquire a captured image of a sample;
• and
• an input and output device configured to operate the image acquisition device, wherein
• the input and output device includes
• an emotion detection unit configured to detect emotion of a user based on at least one of a facial expression image and voice information of the user, and
• a report retention unit configured to generate a conversation document in which a conversation uttered by the user is converted into character string data, extract an impression of the user from the conversation document, create a report in which the facial expression image and the impression are associated with each other, and record the created report.

A report creation method of a charged particle beam apparatus including an image acquisition device configured to acquire a captured image of a sample and an input and output device configured to operate the image acquisition device, the report creation method comprising:

• causing the input and output device to generate a conversation document in which a conversation uttered by a user is converted into character string data and recognize, based on the conversation document, a conversation intention of the user including an instruction to the image acquisition device;
• causing the input and output device to record, as history information, the conversation document, the conversation intention, and a response of the image acquisition device to the instruction to the image acquisition device;
• causing the input and output device to divide a report creation period using a timing when the user issues, to the image acquisition device, an instruction including an intention to save the captured image as a boundary, compare an imaging condition at a timing when an instruction including an intention to save a current captured image is issued with an imaging condition at a timing when an instruction including an intention to save a previous captured image is issued, extract a common condition and a differential condition of imaging conditions between a previous report creation period and a current report creation period, and output report creation information in which the history information divided for each of the report creation periods, and the captured image and the differential condition corresponding to the history information are associated with each other;
• and
• causing the input and output device to create a report for each of the report creation periods based on the report creation information, and record the created report.