Method and apparatus for detecting foreign object included in inspection target

An apparatus performs an operation for detecting a foreign object included in an inspection target, comprising:

• a processor;
• and
• a storage medium in which a computer program is stored, wherein
• the processor executes the computer program to perform
• acquiring first image data for the inspection target, for which pixels each have a pixel value for a first band group including one or more wavelength bands,
• determining, from the first image data, one or more pixel regions that satisfy a first condition to be one or more first foreign object regions,
• acquiring second image data for one or more regions including the one or more first foreign object regions, the one or more regions having pixels each of which has pixel values for a second band group including a larger number of wavelength bands than the first band group,
• determining, from the second image data, one or more pixel regions that satisfy a second condition, which is different from the first condition, to be one or more second foreign object regions, in which the specific foreign object is present, and
• outputting information regarding the one or more second foreign object regions.

A non-transitory computer-readable recording medium storing a program for detecting a foreign object included in an inspection target, the program causing a computer to execute:

• acquiring first image data for the inspection target, for which pixels each have a pixel value for a first band group including one or more wavelength bands;
• determining, from the first image data, one or more pixel regions that satisfy a first condition to be one or more first foreign object regions;
• acquiring second image data for one or more regions including the one or more first foreign object regions, the one or more regions having pixels each of which has pixel values for a second band group including a larger number of wavelength bands than the first band group;
• determining, from the second image data, one or more pixel regions that satisfy a second condition, which is different from the first condition, to be one or more second foreign object regions, in which the specific foreign object is present;
• and
• outputting information regarding the one or more second foreign object regions.

A method for detecting a foreign object included in an inspection target, comprising:

• acquiring one or more first images, the one or more first images corresponding to one or more first wavelength bands;
• determining, based on the one or more first images, one or more regions that satisfy a first condition to be one or more first foreign object regions;
• acquiring second images, each of the second images including one or more regions corresponding to the one or more first foreign object regions, the second images corresponding to second wavelength bands, a total number of the second wavelength bands being greater than a total number of the one or more first wavelength bands;
• determining, based on the second images, one or more regions that satisfy a second condition, which is different from the first condition, to be one or more second foreign object regions, in which the foreign object is present;
• and
• outputting information regarding the one or more second foreign object regions.