Evaluation apparatus, information processing apparatus, computer-readable storage medium, film forming system, and article manufacturing method
AssigneeCanon Kabushiki Kaisha
InventorSATORU JIMBO
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Abstract
An evaluation apparatus includes an obtaining unit configured to obtain an image of an evaluation region including a film forming region on which a film is formed by a film forming process, and a processor configured to process the image for the evaluation. The processor is configured to output a feature concerning an abnormality in the image in accordance with a learned model. The image and design information representing a geometrical feature of the film forming region are input to the learned model.
Claims17
An evaluation apparatus configured to perform, concerning a substrate that has undergone a film forming process of forming a film of a composition on a film forming region of the substrate using a mold, evaluation of the film, the apparatus comprising:
- an obtaining unit configured to obtain an image of an evaluation region including the film forming region on which the film is formed by the film forming process;
- and
- a processor configured to process the image for the evaluation,
- wherein the processor is configured to output a feature concerning an abnormality in the image in accordance with a learned model, and
- the image and design information representing a geometrical feature of the film forming region are input to the learned model.
A computer-readable storage medium storing a program configured to cause a computer to function as an evaluation apparatus configured to perform, concerning a substrate that has undergone a film forming process of forming a film of a composition on a film forming region of the substrate using a mold, evaluation of the film, the program causing the computer to function as:
- an obtaining unit configured to obtain an image of an evaluation region including the film forming region on which the film is formed by the film forming process;
- and
- a processor configured to process the image for the evaluation,
- wherein the processor is configured to output a feature concerning an abnormality in the image in accordance with a learned model, and
- the image and design information representing a geometrical feature of the film forming region are input to the learned model.
An information processing apparatus comprising:
- an obtaining unit configured to, concerning a substrate that has undergone a film forming process of forming a film of a composition on a film forming region of the substrate using a mold, obtain an image of an evaluation region including the film forming region and design information representing a geometrical feature of the film forming region;
- and
- a learning unit configured to perform machine learning for a relationship between the image and the design information and a feature concerning an abnormality in the image and create a learned model.
A computer-readable storage medium storing a program configured to cause a computer to function as:
- an obtaining unit configured to, concerning a substrate that has undergone a film forming process of forming a film of a composition on a film forming region of the substrate using a mold, obtain an image of an evaluation region including the film forming region and design information representing a geometrical feature of the film forming region;
- and
- a learning unit configured to perform machine learning for a relationship between the image and the design information and a feature concerning an abnormality in the image and create a learned model.
Dependencies are inferred from the claim text.