Reconstruction of a distorted image of an array of structural elements of a specimen
AssigneeApplied Materials Israel Ltd.
InventorsYehuda Cohen, Rafael Bistritzer
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AssigneeApplied Materials Israel Ltd.
InventorsYehuda Cohen, Rafael Bistritzer
Estimating the term…
There is provided a method and a system configured to compensate for image distortions. An example method includes first receiving a warped image of an array of cells of a specimen. Each cell of the array comprises one or more structural elements of a substrate. A reference image of a region associated with a cell of the array of cells is generated and a first cell of the array of cells is identified using the reference image and at least part of the warped image. One or more locations comprising cells that differ from the first cell are identified and, based at least on the one or more locations, a warped compensation transform is determined. The warped compensation transform is applied on the warped image to generate an undistorted image.
A system, comprising:
A method, comprising:
A non-transitory computer readable storage medium comprising instructions that, when executed by a processing device, cause the processing device to perform operations comprising:
Dependencies are inferred from the claim text.