Semiconductor wafer test system for controlling supply of power to semiconductor wafer test apparatus and method of controlling supply of power to semiconductor wafer test apparatus

Abstract

A semiconductor wafer test system for controlling the supply of power to a semiconductor wafer test apparatus is provided. The semiconductor wafer test system includes a test operating server and the semiconductor wafer test apparatus. The test operating server manages a wafer test schedule and allocates lots to a prober, which loads wafers into the semiconductor wafer test apparatus, in accordance with the wafer test schedule. The test operating server sends a mode switch request to the semiconductor wafer test apparatus in accordance with the wafer test schedule, and the semiconductor wafer test apparatus is switched to a waiting mode in response to receipt of a request to switch to the waiting mode from the test operating server, and is switched to a ready mode in response to receipt of a request to switch to the ready mode from the test operating server.

Dependencies are inferred from the claim text.