Detection method and detection device
AssigneeShimadzu Corporation
InventorTakashi NYU
Life of this patent
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Abstract
A detection method and a detection device capable of increasing position resolution when detecting a characteristic value distributed in a plane of a sample are provided. The detection method is configured to detect the characteristic value distributed in the plane of the sample by scanning the sample for each analysis area. The detection method includes the steps of: detecting the characteristic value of the sample a plurality of times while moving the analysis area in the plane of the sample so that the partial region of the analysis area overlaps; and calculating the characteristic value distributed in the plane of the sample in a unit of an overlapping region by performing statistical processing on detection results including the same region.
Claims8
A detection method of detecting a characteristic value distributed in a plane of a sample by scanning the sample for each analysis area, the detection method comprising the steps of:
- detecting the characteristic value of the sample a plurality of times while moving the analysis area in the plane of the sample so that a partial region of the analysis area overlaps;
- and
- performing statistical processing on detection results including the same region to calculate the characteristic value distributed in the plane of the sample in a unit of an overlapping region.
A detection device for detecting a characteristic value distributed in a plane of a sample, comprising:
- a detector configured to detect the characteristic value;
- a moving mechanism configured to scan the sample for each analysis area;
- a controller configured to control the detector and the moving mechanism;
- and
- an operation unit configured to calculate the characteristic value distributed in the plane of the sample from detection results detected by the detector,
- wherein the controller detects the characteristic value of the sample a plurality of times by the detector while moving the analysis area in the plane of the sample so that a partial region of the analysis area overlaps, and
- wherein the operation unit performs statistical processing on the detection results including the same region, and calculates the characteristic value distributed in the plane of the sample in a unit of an overlapping region.
Dependencies are inferred from the claim text.