Resistive pressure sensor with improved structure design

A resistive pressure sensor comprising:

• a flexible pressure substrate having a pressure receiving surface and a support substrate facing surface and being parallel to a support substrate;
• a pressure electrode layer disposed on the support substrate facing surface of the flexible pressure substrate;
• an elastic dielectric spacer with a microstructure;
• a pressure-sensitive composite layer having a first surface facing the pressure electrode layer and a second surface opposite and parallel to the first surface, wherein the pressure-sensitive composite layer comprises a conductive one-dimensional nanomaterial oriented substantially perpendicular to the first surface;
• a support electrode layer disposed on a pressure substrate facing surface of the support substrate and facing the pressure electrode layer;
• wherein the support electrode layer and pressure electrode layer are further patterned into a plurality of isolated paths,
• wherein the plurality of isolated paths in the support electrode layer intersect the plurality of isolated paths in the pressure electrode layer, and
• the support substrate,
• wherein the elastic dielectric spacer with the microstructure and the pressure-sensitive composite layer are positioned between the pressure electrode layer and the support electrode layer and are optically transparent,
• wherein the elastic dielectric spacer with the microstructure is attached to the first surface of the pressure-sensitive composite layer and contacts the pressure electrode layer, and the support electrode layer is attached to the second surface of the pressure-sensitive composite layer and is directly in electrical contact with the pressure-sensitive composite layer;
• or wherein the elastic dielectric spacer with the microstructure is attached to the second surface of the pressure-sensitive composite layer and contacts the support electrode layer, and the pressure electrode layer is attached to the first surface of the pressure-sensitive composite layer and is directly in electrical contact with the pressure-sensitive composite layer, and
• wherein the elastic dielectric spacer with the microstructure comprises a transparent elastic dielectric film and a plurality of size-varied straight holes penetrating through the transparent elastic dielectric film in a thickness direction of the transparent elastic dielectric film.

A resistive pressure sensor comprising:

• a flexible pressure substrate having a pressure receiving surface and a support substrate facing surface and being parallel to a support substrate;
• a pressure electrode layer disposed on the support substrate facing surface of the flexible pressure substrate;
• an elastic dielectric spacer with a microstructure;
• a pressure-sensitive composite layer having a first surface facing the pressure electrode layer and a second surface opposite and parallel to the first surface, wherein the pressure-sensitive composite layer comprises a conductive one-dimensional nanomaterial oriented substantially perpendicular to the first surface;
• wherein the pressure-sensitive composite layer further consists of a pre-patterned structure of isolated paths;
• a support electrode layer disposed on a pressure substrate facing surface of the support substrate and facing the pressure electrode layer;
• wherein the support electrode laver and pressure electrode laver are further patterned into a plurality of isolated paths,
• wherein the plurality of isolated paths in the support electrode layer intersect the plurality of isolated paths in the pressure electrode layer,
• wherein the isolated paths structure of the pressure-sensitive composite layer completely overlap with the isolated paths structure of the pressure electrode layer, and
• the support substrate,
• wherein the elastic dielectric spacer with the microstructure and the pressure-sensitive composite layer are positioned between the pressure electrode layer and the support electrode layer and are optically transparent,
• wherein the elastic dielectric spacer with the microstructure is attached to the first surface of the pressure-sensitive composite layer and contacts the pressure electrode layer, and the support electrode layer is attached to the second surface of the pressure-sensitive composite layer and is directly in electrical contact with the pressure-sensitive composite layer;
• or wherein the elastic dielectric spacer with the microstructure is attached to the second surface of the pressure-sensitive composite layer and contacts the support electrode layer, and the pressure electrode layer is attached to the first surface of the pressure-sensitive composite layer and is directly in electrical contact with the pressure-sensitive composite layer, and
• wherein the elastic dielectric spacer with the microstructure comprises a transparent elastic dielectric film and a plurality of size-varied straight holes penetrating through the transparent elastic dielectric film in a thickness direction of the transparent elastic dielectric film.

A resistive pressure sensor comprising:

• a flexible pressure substrate having a pressure receiving surface and a support substrate facing surface and being parallel to a support substrate;
• a pressure electrode layer disposed on the support substrate facing surface of the flexible pressure substrate;
• an elastic dielectric spacer with a microstructure;
• a pressure-sensitive composite layer having a first surface facing the pressure electrode layer and a second surface opposite and parallel to the first surface, wherein the pressure-sensitive composite layer comprises a conductive one-dimensional nanomaterial oriented substantially perpendicular to the first surface;
• wherein the pressure-sensitive composite layer further consists of a pre-patterned structure of isolated 2-dimensional dots arrays;
• a support electrode layer disposed on a pressure substrate facing surface of the support substrate and facing the pressure electrode layer;
• wherein the support electrode layer and pressure electrode layer are further patterned into a plurality of isolated paths,
• wherein the plurality of isolated paths in the support electrode layer intersect the plurality of isolated paths in the pressure electrode layer,
• wherein at least one dot of the isolated 2-dimensional dots array structure of the pressure-sensitive composite layer is located at each of the intersecting areas between the isolated paths structure of the support electrode layer and the pressure electrode layer, and
• the support substrate,
• wherein the elastic dielectric spacer with the microstructure and the pressure-sensitive composite layer are positioned between the pressure electrode layer and the support electrode layer and are optically transparent,
• wherein the elastic dielectric spacer with the microstructure is attached to the first surface of the pressure-sensitive composite layer and contacts the pressure electrode layer, and the support electrode layer is attached to the second surface of the pressure-sensitive composite layer and is directly in electrical contact with the pressure-sensitive composite layer;
• or wherein the elastic dielectric spacer with the microstructure is attached to the second surface of the pressure-sensitive composite layer and contacts the support electrode layer, and the pressure electrode layer is attached to the first surface of the pressure sensitive composite layer and is directly in electrical contact with the pressure sensitive composite layer, and
• wherein the elastic dielectric spacer with the microstructure comprises a transparent elastic dielectric film and a plurality of size-varied straight holes penetrating through the transparent elastic dielectric film in a thickness direction of the transparent elastic dielectric film.