Back to results
US 2023/0417609 A1Published application
Lithographic strain gauge in an electrically conducting substrate
AssigneeMicrosoft Technology Licensing, LLC
InventorsLuke Thomas GREGORY, Rick Chun Kit CHEUNG
Life of this patent
Estimating the term…
Abstract
An electrically conducting substrate includes a plurality of layers. A strain gauge is deposited on a layer of the plurality of layers. The strain gauge measures the stress and/or strain of the electrically conducting substrate. This allows the strain gauge to determine whether a stress or strain of the electrically conducting substrate has caused the electrically conducting substrate to deform, crack, or break.
Claims20
An electronic circuit, comprising:
- an electrically conductive substrate formed from:
- a bottom layer;
- a top layer;
- and
- a strain gauge deposited on a layer between the bottom layer and the top layer.
2 more elements
A computing device, comprising:
- an electrically conducting substrate, the electrically conducting substrate including:
- a plurality of layers including a bottom layer and a top layer;
- and
- a strain gauge located in the plurality of layers between the bottom layer and the top layer, the strain gauge being configured to measure a strain of the electrically conducting substrate.
1 more element
A method for manufacturing a substrate, comprising:
- depositing a first layer of an electrically conducting substrate;
- depositing a strain gauge on the first layer of the electrically conducting substrate;
- and
- depositing a second layer of the electrically conducting substrate on top of the strain gauge.
1 more element
Dependencies are inferred from the claim text.