Heat treatment apparatus and temperature regulation method of heat treatment apparatus
AssigneeTokyo Electron Limited
InventorsMakoto TAKAHASHI, Kazuteru OBARA, Tatsuya YAMAGUCHI
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Abstract
A heat treatment apparatus includes: a processing container having an interior space in which substrates are processed; a temperature adjustment furnace that is disposed around the processing container and heats the substrates from the outer side of the processing container; and an internal temperature adjustment unit that is movable relative to the processing container and supplies a temperature adjustment gas for regulating a temperature of the processing container into the interior space in a state of being disposed facing an opening that opens the interior space.
Claims12
A heat treatment apparatus comprising:
- a processing container having an interior space in which substrates are processed;
- a temperature adjustment furnace disposed around the processing container and configured to heat the substrates accommodated in the interior space from an outer side of the processing container;
- and
- an internal temperature adjustment block movable relative to the processing container and configured to supply a temperature adjustment gas for regulating a temperature of the processing container into the interior space in a state of being disposed facing an opening that opens the interior space.
A temperature regulation method comprising:
- (a) providing a heat treatment apparatus equipped with a processing container having an interior space in which substrates are processed;
- (b) heating the substrates accommodated in the interior space from an outer side of the processing container by a temperature adjustment furnace disposed around the processing container;
- and
- (c) moving an internal temperature adjustment block relative to the processing container to dispose the internal temperature adjustment block to face an opening that opens the interior space;
- and
- (d) in a state where the internal temperature adjustment block is disposed facing the opening, supplying a temperature adjustment gas for regulating a temperature of the processing container into the interior space.
Dependencies are inferred from the claim text.