Substrate processing apparatus and substrate processing system having the same

A substrate processing system comprising:

• a substrate storage module in which a substrate is loaded and stored;
• a substrate processing apparatus comprising:
• a first processing module in which substrate processing is performed on a plurality of substrates;
• a second processing module disposed adjacent to the first processing module to perform the substrate processing on the plurality of substrates;
• a first utility part disposed adjacent to a rear surface of the first processing module;
• a second utility part disposed adjacent to a rear surface of the second processing module to define a maintenance space between the second processing module and the first utility unit;
• and
• an upper support part provided between the first utility part and the second utility part to divide the maintenance space into an upper area and a lower area,
• wherein the substrate processing apparatus is configured to process the substrate and has a vertical structure;
• and
• a substrate transfer module configured to transfer the substrate between the substrate storage module and the substrate processing apparatus.