Pedestal including seal
AssigneeLam Research Corporation
InventorChristopher GAGE
Life of this patent
Estimating the term…
Abstract
A pedestal assembly for a substrate processing system includes a pedestal including a pedestal plate with a plurality of gas through holes and a stem extending downwardly from the pedestal plate. The plurality of gas through holes extend from a first surface of the pedestal plate to a second surface of the pedestal plate at a location radially outside of the stem. A collar is arranged around the stem of the pedestal and openings of the plurality of gas through holes are located on the second surface of the pedestal. The collar defines an annular volume between the collar and the stem of the pedestal. An upwardly facing surface of the collar makes a surface-to-surface seal with the second surface of the pedestal.
Claims31
A pedestal assembly comprising:
- a pedestal including a pedestal plate with a plurality of gas through holes and a stem extending from the pedestal plate,
- wherein the plurality of gas through holes extend from a first surface of the pedestal plate to a second surface of the pedestal plate at a location radially outside of the stem;
- and
- a collar arranged around the stem of the pedestal and openings of the plurality of gas through holes located on the second surface of the pedestal,
- wherein the collar defines an annular volume between an inner surface of the collar and an outer surface of the stem of the pedestal, and
- wherein a first surface of the collar makes a surface-to-surface seal with the second surface of the pedestal.
A pedestal assembly comprising:
- a pedestal including a pedestal plate with a plurality of gas through holes and a stem extending from the pedestal plate,
- wherein the plurality of gas through holes extend from a first surface of the pedestal plate to a second surface of the pedestal plate;
- and
- a collar arranged around the stem of the pedestal,
- wherein the pedestal plate has a first diameter, the stem has a second diameter that is less than the first diameter, and the collar has a third diameter that is less than the first diameter and greater than the second diameter,
- wherein the plurality of gas through holes are arranged in a first region of the pedestal plate that is defined between the second diameter and third diameter,
- wherein the plurality of gas through holes are not located in a second region outside of the first region and a third region located inside of the first region, and
- wherein the collar defines an annular volume between the collar and the stem of the pedestal.
Dependencies are inferred from the claim text.