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US 2023/0416913 A1Published application
Modules for delivery systems and related methods
AssigneeEntegris, Inc.
InventorsBryan C. Hendrix, Carlo Waldfried, Scott L. Battle, Gavin Richards, Benjamin R. Garrett
Life of this patent
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Abstract
A system including a chemical supply cabinet (e.g., such as a chemical supply cabinet configured to contain an ampoule), a module configured to modify a surface, and a control unit connected to the module, wherein the control unit is configured to direct the modifying of the surface.
Claims20
A system comprising:
- a chemical supply cabinet;
- a module configured to modify a surface;
- and
- a control unit connected to the module, wherein the control unit is configured to direct the modifying of the surface.
1 more element
A method comprising:
- connecting a module to a chemical supply cabinet;
- after connecting the module to the chemical supply cabinet, controlling the module to modify a surface;
- and
- modifying the surface via the module.
1 more element
A system comprising:
- a chemical supply cabinet, wherein a structure of the chemical supply cabinet defines an interior volume of the chemical supply cabinet;
- a module connected to the interior volume of the chemical supply cabinet;
- a tool connected to the module;
- and
- a supply line connecting the chemical supply cabinet to the tool,
- wherein, after connecting the module to the chemical supply cabinet, the module is configured to modify a surface.
3 more elements
Dependencies are inferred from the claim text.