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US 2023/0416422 A1Published application
Composition, method for manufacturing semiconductor substrate, polymer, and method for manufacturing polymer
AssigneeJsr Corporation
InventorsHiroki NAKATSU, Shuhei Yamada, Shinya Abe, Takashi Tsuji, Kanako Ueda, Hiroyuki Miyauchi
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Abstract
A composition includes: a polymer including a repeating unit represented by formula (1); and a solvent. In the formula (1), Ar1 is a divalent group including an aromatic ring having 10 to 40 ring atoms; and R0 is a monovalent group including a heteroaromatic ring which includes a sulfur atom as a ring-forming atom.
Claims19
A composition comprising:
- a polymer comprising a repeating unit represented by formula (1);
- and
- a solvent,
- wherein, in the formula (1), Ar1 is a divalent group comprising an aromatic ring having 10 to 40 ring atoms;
- and R0 is a monovalent group comprising a heteroaromatic ring which comprises a sulfur atom as a ring-forming atom.
2 more elements
A polymer comprising a repeating unit represented by formula (1),
- wherein, in the formula (1), Ar1 is a divalent group comprising an aromatic ring having 10 to 40 ring atoms;
- and R0 is a monovalent group comprising a heteroaromatic ring which comprises a sulfur atom as a ring-forming atom.
A method for producing a polymer comprising:
- reacting a first compound comprising an aromatic ring having 10 to 40 ring atoms with a second compound represented by formula (4-1), (4-2), (4-3) or (4-4),
- wherein, in the formula (4-1), R0a is a monovalent group comprising a heteroaromatic ring which comprises a sulfur atom as a ring-forming atom,
- wherein, in the formula (4-2), R0a is as defined in the formula (4-1);
- and Rx1 and Rx2 are each independently a monovalent hydrocarbon group having 1 to 10 carbon atoms,
- wherein, in the formula (4-3), R0a is as defined in the formula (4-1);
- and Rx3 is a divalent hydrocarbon group having 1 to 10 carbon atoms,
- wherein, in the formula (4-4), R0a′ is a divalent organic group which is obtained by removing one hydrogen atom from the group represented by R0a in the formula (4-1);
- and Rx4 is a monovalent hydrocarbon group having 1 to 10 carbon atoms.
5 more elements
Dependencies are inferred from the claim text.