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US 2023/0416078 A1Published application
Semiconductor Device
AssigneeInfineon Technologies AG
InventorsAndreas Bogner, Christian Bretthauer, Abhiraj Basavanna
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Abstract
A semiconductor device has a deformable membrane, e.g., for the measurement of at least one of an acceleration, a vibration, or a pressure. The membrane has a supporting connection with a support structure which includes at least one elastic supporting connection. Also disclosed are a sensor device including the semiconductor device along with methods for manufacturing the semiconductor device and the sensor device.
Claims20
A semiconductor device comprising:
- a deformable membrane;
- a support structure, the deformable membrane being connected to the support structure through at least one supporting connection, wherein the at least one supporting connection includes at least one elastic supporting connection;
- at least one electric contact to obtain an electric signal indicative of the deformation of the deformable membrane;
- and
- at least one mass element attached to, or integral with, the deformable membrane.
2 more elements
A sensor device, comprising:
- a semiconductor device including:
- a deformable membrane;
- a support structure connected to deformable membrane through at least one supporting connection, the at least one supporting connection including at least one elastic supporting connection;
- at least one electric contact to obtain an electric signal indicative of deformation of the deformable membrane;
- and
- at least one mass element attached to, or integral with, the deformable membrane;
- analog-to-digital circuitry to convert the electric signal indicative of deformation of the deformable membrane onto a digital version;
- and
- at least one digital measurer to obtain, from the digital version of the electric signal, a measurement of at least one pressure, vibration, or acceleration.
6 more elements
A method for manufacturing a semiconductor device, the method comprising:
- making a support structure and a deformable membrane supported by the support structure through at least one supporting connection, in such a way that the at least one supporting connection includes at least one elastic connection, with at least one mass element being attached to, or integral with, the deformable membrane;
- and
- electrically connecting the deformable membrane to circuitry, the circuitry being configured to acquire an electric signal indicative of deformation of the deformable membrane conditioned by movement of the at least one mass element.
Dependencies are inferred from the claim text.